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    I Like this quote I dislike this quote“Non-uniformity was not a big issue in the past. We typically cranked up the power until we got full removal. Now, however, we have fragile lines that easily damage. The major issue is non-uniformity, where you can have damage on one part of the wafer and zero particle removal efficiency on another part of the wafer.”

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    I Like this quote I dislike this quote“Better uniformity is probably the biggest benefit.”

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    I Like this quote I dislike this quote“One concern is that the cleaning occurs at a certain angle, and you will not get symmetric cleaning on two sides of a trench.”

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